| 2.7<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n \u5982\u679c\u53ea\u770b resolution：<\/p>\n NA = 0.40 \u6700\u597d\u3002<\/p>\n \u5982\u679c\u770b\u68c0\u6d4b\u80fd\u529b：<\/p>\n NA \u2248 0.20 \u53cd\u800c\u53ef\u80fd\u66f4\u4f18\u3002<\/p>\n \u8fd9\u624d\u662f\u771f\u6b63\u7684\u5de5\u7a0b trade-off\u3002<\/p>\n
\n![\"\"](\"https:\/\/www.wsisp.com\/helps\/wp-content\/uploads\/2026\/09\/20260901171732-6a9708ac0015a.png\") <\/h3>\n
\n\u516b\u3001\u7b2c\u4e09\u4e2a\u7ecf\u5e38\u88ab\u4f4e\u4f30\u7684\u53d8\u91cf：\u7167\u660e\u76f8\u5e72\u6027<\/h2>\n
\u5f88\u591a AOI \u7814\u53d1\u8ba8\u8bba\u91cc，<\/p>\n illumination \u5f80\u5f80\u88ab\u7b80\u5316\u6210：<\/p>\n \u201c\u4eae\u5ea6\u591f\u4e0d\u591f\u201d\u3002<\/p>\n \u4f46\u5bf9\u4e8e\u5fae\u5c0f\u76f8\u4f4d\u7f3a\u9677，<\/p>\n illumination coherence \u4f1a\u76f4\u63a5\u6539\u53d8\u6210\u50cf\u673a\u5236\u3002<\/p>\n \u9ad8\u5ea6\u76f8\u5e72\u7167\u660e\u80fd\u591f\u589e\u5f3a：<\/p>\n interference；<\/p>\n phase sensitivity\u3002<\/p>\n \u4f46\u540c\u65f6\u4e5f\u5bb9\u6613\u4ea7\u751f：<\/p>\n speckle；<\/p>\n coherent artifact；<\/p>\n dust interference；<\/p>\n surface roughness background\u3002<\/p>\n \u4f4e\u76f8\u5e72\u7167\u660e\u5219\u53ef\u80fd\u964d\u4f4e\u8fd9\u4e9b\u80cc\u666f，<\/p>\n \u4f46\u540c\u65f6\u964d\u4f4e\u67d0\u4e9b phase defect \u7684 signal\u3002<\/p>\n \u6240\u4ee5\u5b9e\u9645\u7cfb\u7edf\u4e0d\u662f：<\/p>\n Coherent \u597d<\/p>\n \u6216\u8005：<\/p>\n Incoherent \u597d\u3002<\/p>\n \u800c\u662f\u8981\u627e\u5230：<\/p>\n [
\nCoherence_{\\\\rm optimal}
\n]<\/p>\n
\n\u4e5d\u3001\u540c\u4e00\u4e2a\u7f3a\u9677，\u6362\u4e00\u79cd\u7167\u660e\u4ee5\u540e\u53ef\u80fd\u5b8c\u5168\u50cf\u53e6\u4e00\u4e2a\u4e1c\u897f<\/h2>\n\u5047\u8bbe\u68c0\u6d4b\u540c\u4e00\u4e2a pit\u3002<\/p>\n Illumination A<\/h4>\n\u9ad8\u7a7a\u95f4\u76f8\u5e72\u3002<\/p>\n \u7ed3\u679c：<\/p>\n \u7f3a\u9677 contrast \u9ad8，<\/p>\n \u4f46\u80cc\u666f speckle：<\/p>\n [
\n\\\\sigma=4.2%
\n]<\/p>\n Illumination B<\/h4>\n\u90e8\u5206\u76f8\u5e72\u3002<\/p>\n \u7f3a\u9677 contrast \u7565\u4f4e，<\/p>\n \u4f46\u80cc\u666f：<\/p>\n [
\n\\\\sigma=1.1%
\n]<\/p>\n \u4e8e\u662f：<\/p>\n A：<\/p>\n [
\nSNR=2.8
\n]<\/p>\n B：<\/p>\n [
\nSNR=6.3
\n]<\/p>\n \u867d\u7136 B \u7684\u7f3a\u9677\u201c\u770b\u8d77\u6765\u6ca1\u90a3\u4e48\u4eae\u201d，<\/p>\n \u5b9e\u9645 detection reliability \u5374\u660e\u663e\u66f4\u9ad8\u3002<\/p>\n \u8fd9\u5c31\u662f\u4e3a\u4ec0\u4e48：<\/p>\n \u4eba\u773c\u89c9\u5f97\u660e\u663e，\u4e0d\u7b49\u4e8e\u7b97\u6cd5\u6700\u597d\u68c0\u6d4b\u3002<\/p>\n
\n\u5341\u3001\u5230\u8fd9\u91cc，UniOptics \u5efa\u6a21\u5bf9\u8c61\u5df2\u7ecf\u4e0d\u5e94\u8be5\u53ea\u662f\u201c\u7269\u955c\u201d<\/h2>\n\u5982\u679c\u56f4\u7ed5\u7f57\u8fc5\u79d1\u6280 UniOptics \u5efa\u7acb\u771f\u6b63\u6709\u5de5\u7a0b\u610f\u4e49\u7684 AOI \u6a21\u578b，\u7cfb\u7edf\u94fe\u5e94\u8be5\u662f：<\/p>\n Illumination Source<\/p>\n \u2193<\/p>\n Partial Coherence<\/p>\n \u2193<\/p>\n Polarization<\/p>\n \u2193<\/p>\n Defect Geometry<\/p>\n \u2193<\/p>\n Material Complex Refractive Index<\/p>\n \u2193<\/p>\n Scattering \/ Phase Modulation<\/p>\n \u2193<\/p>\n Propagation<\/p>\n \u2193<\/p>\n Objective Pupil<\/p>\n \u2193<\/p>\n Aberration<\/p>\n \u2193<\/p>\n Detector Plane<\/p>\n \u2193<\/p>\n Pixel Sampling<\/p>\n \u2193<\/p>\n Detection Metric\u3002<\/p>\n \u771f\u6b63\u4f20\u64ad\u7684\u6838\u5fc3\u53d8\u91cf\u59cb\u7ec8\u662f：<\/p>\n A(x,y)e^{i\\\\phi(x,y)}
\n]<\/p>\n \u800c\u4e0d\u662f\u53ea\u6709 ray\u3002<\/p>\n \u8fd9\u4e5f\u662f\u8fd9\u7c7b\u95ee\u9898\u4e3a\u4ec0\u4e48\u5929\u7136\u5c5e\u4e8e：<\/p>\n \u7cfb\u7edf\u7ea7\u7269\u7406\u5149\u5b66\u4eff\u771f\u3002<\/p>\n
\n![\"\"](\"https:\/\/www.wsisp.com\/helps\/wp-content\/uploads\/2026\/09\/20260901171732-6a9708acb6c6a.png\") <\/h3>\n
\n\u5341\u4e00\u3001\u73b0\u5728\u518d\u52a0\u5165\u771f\u5b9e\u4e16\u754c\u6700\u9ebb\u70e6\u7684\u4e00\u9879：\u8868\u9762\u7c97\u7cd9\u5ea6<\/h2>\n
\u771f\u5b9e\u73bb\u7483\u8868\u9762\u4e0d\u662f\u7406\u60f3\u5e73\u9762\u3002<\/p>\n \u5b58\u5728：<\/p>\n PSD\u3002<\/p>\n \u4e5f\u5c31\u662f\u4e0d\u540c spatial frequency \u7684 surface error\u3002<\/p>\n \u8fd9\u4e9b\u7ed3\u6784\u7ecf\u8fc7 illumination \u548c imaging system \u540e，<\/p>\n \u4e5f\u4f1a\u5f62\u6210 intensity fluctuation\u3002<\/p>\n \u4e8e\u662f detector \u4e0a\u770b\u5230\u7684\u662f：<\/p>\n I_{\\\\rm defect}
\n+
\nI_{\\\\rm roughness}
\n+
\nI_{\\\\rm system}
\n+
\nI_{\\\\rm noise}
\n]<\/p>\n \u6240\u4ee5\u771f\u6b63\u56f0\u96be\u7684\u95ee\u9898\u4e0d\u662f：<\/p>\n \u201c20 nm defect \u6709\u6ca1\u6709\u4fe1\u53f7？\u201d<\/p>\n \u800c\u662f：<\/p>\n 20 nm defect \u7684 signal \u80fd\u4e0d\u80fd\u4ece\u771f\u5b9e surface background \u4e2d\u88ab\u7a33\u5b9a\u533a\u5206\u51fa\u6765？<\/p>\n \u8fd9\u4e00\u6b65\u7279\u522b\u91cd\u8981\u3002<\/p>\n \u56e0\u4e3a\u5b9e\u9a8c\u5ba4 ideal sample \u4e0a\u5f88\u597d\u770b\u7684\u65b9\u6848，<\/p>\n \u653e\u5230\u91cf\u4ea7\u771f\u5b9e\u57fa\u677f\u4ee5\u540e\u53ef\u80fd\u5b8c\u5168\u5931\u8d25\u3002<\/p>\n
\n\u5341\u4e8c\u3001\u4e8e\u662f\u201c\u6700\u5c0f\u53ef\u68c0\u7f3a\u9677\u201d\u4e0d\u80fd\u518d\u53ea\u662f\u4e00\u4e2a\u5c3a\u5bf8<\/h2>\n\u8bbe\u5907\u89c4\u683c\u4e66\u7ecf\u5e38\u5199：<\/p>\n Minimum Detectable Defect：<\/p>\n [
\n5\\\\ \\\\mu m
\n]<\/p>\n \u4f46\u8fd9\u5176\u5b9e\u975e\u5e38\u4e0d\u5b8c\u6574\u3002<\/p>\n 5 \u03bcm \u7684：<\/p>\n Particle；<\/p>\n Pit；<\/p>\n Scratch；<\/p>\n Phase Bump；<\/p>\n Refractive-index Variation<\/p>\n \u6839\u672c\u4e0d\u662f\u540c\u4e00\u79cd optical object\u3002<\/p>\n \u5373\u4f7f\u51e0\u4f55\u5c3a\u5bf8\u5b8c\u5168\u76f8\u540c，<\/p>\n \u5bf9\u5e94\u7684：<\/p>\n [
\nA(x,y)
\n]<\/p>\n \u548c：<\/p>\n [
\n\\\\phi(x,y)
\n]<\/p>\n \u4e5f\u5b8c\u5168\u4e0d\u540c\u3002<\/p>\n \u6240\u4ee5\u66f4\u5408\u7406\u7684\u89c4\u683c\u5e94\u8be5\u53d8\u6210：<\/p>\n f(
\nSize,
\nDepth,
\nMaterial,
\nShape,
\nOrientation,
\nOptical\\\\ Condition
\n)
\n]<\/p>\n \u4e5f\u5c31\u662f：<\/p>\n Defect Detectability Map\u3002<\/p>\n
\n\u5341\u4e09\u3001\u8fd9\u5f20\u5730\u56fe\u53ef\u80fd\u6bd4\u201c5 \u03bcm \u5206\u8fa8\u7387\u201d\u503c\u94b1\u5f97\u591a<\/h2>\n\u4f8b\u5982\u505a Monte Carlo\u3002<\/p>\n \u968f\u673a\u751f\u6210：<\/p>\n Defect Diameter：<\/p>\n [
\n2\\\\sim30\\\\ \\\\mu m
\n]<\/p>\n Depth：<\/p>\n [
\n5\\\\sim100\\\\ nm
\n]<\/p>\n Surface Roughness；<\/p>\n Focus Error；<\/p>\n Illumination Variation；<\/p>\n Lens WFE；<\/p>\n Sensor Noise\u3002<\/p>\n \u6bcf\u4e00\u79cd\u72b6\u6001\u4f20\u64ad\u5230 detector\u3002<\/p>\n \u7136\u540e\u7ecf\u8fc7\u540c\u4e00\u4e2a detection threshold\u3002<\/p>\n \u6700\u7ec8\u5f97\u5230：<\/p>\n [
\nP_{\\\\rm detect}
\n]<\/p>\n \u4f8b\u5982：<\/p>\n 10 \u03bcm \u00d7 10 nm pit<\/h4>\nDetection Probability：<\/p>\n 42%\u3002<\/p>\n 10 \u03bcm \u00d7 30 nm pit<\/h4>\n96%\u3002<\/p>\n 5 \u03bcm \u00d7 50 nm particle<\/h4>\n99.8%\u3002<\/p>\n 20 \u03bcm \u00d7 8 nm phase bump<\/h4>\n31%\u3002<\/p>\n \u8fd9\u65f6\u5019\u9500\u552e\u56e2\u961f\u518d\u8bf4：<\/p>\n \u201c\u6211\u4eec\u7684\u8bbe\u5907\u53ef\u4ee5\u68c0\u6d4b 5 \u03bcm \u7f3a\u9677\u201d<\/p>\n \u5df2\u7ecf\u4e0d\u591f\u51c6\u786e\u3002<\/p>\n \u771f\u6b63\u9ad8\u7ea7\u7684\u4ea7\u54c1\u80fd\u529b\u5e94\u8be5\u662f：<\/p>\n \u5728\u4ec0\u4e48\u6750\u6599\u3001\u4ec0\u4e48\u7f3a\u9677\u7c7b\u578b\u3001\u4ec0\u4e48\u6df1\u5ea6\u3001\u4ec0\u4e48\u8868\u9762\u80cc\u666f\u548c\u4ec0\u4e48\u7cfb\u7edf\u72b6\u6001\u4e0b，\u53ef\u4ee5\u8fbe\u5230\u591a\u5c11\u68c0\u6d4b\u6982\u7387？<\/p>\n
\n![\"\"](\"https:\/\/www.wsisp.com\/helps\/wp-content\/uploads\/2026\/09\/20260901171733-6a9708ad78996.png\") <\/h3>\n
\n\u5341\u56db\u3001\u8fd9\u65f6\u5019\u4eff\u771f\u5f00\u59cb\u771f\u6b63\u5f71\u54cd\u786c\u4ef6 BOM<\/h2>\n
\u5047\u8bbe\u5f53\u524d AOI：<\/p>\n NA = 0.30；<\/p>\n \u9ad8\u76f8\u5e72\u6fc0\u5149\u7167\u660e；<\/p>\n Camera A；<\/p>\n Best Focus imaging\u3002<\/p>\n \u76ee\u6807：<\/p>\n 20 nm phase pit：<\/p>\n [
\nP_{\\\\rm detect}>99%
\n]<\/p>\n \u73b0\u5728\u6709\u56db\u4e2a\u5347\u7ea7\u65b9\u6848\u3002<\/p>\n \u65b9\u6848 A：\u6362\u66f4\u9ad8 NA \u7269\u955c<\/h4>\n\u6210\u672c：<\/p>\n \u9ad8\u3002<\/p>\n \u4eff\u771f\u7ed3\u679c：<\/p>\n Detection Probability：<\/p>\n 94%\u3002<\/p>\n \u65b9\u6848 B：\u6362\u66f4\u9ad8\u50cf\u7d20\u76f8\u673a<\/h4>\n\u6210\u672c：<\/p>\n \u4e2d\u3002<\/p>\n \u7ed3\u679c：<\/p>\n 89%\u3002<\/p>\n \u65b9\u6848 C：\u6539\u53d8 illumination coherence + detector defocus<\/h4>\n\u6210\u672c：<\/p>\n \u4f4e\u2014\u4e2d\u3002<\/p>\n \u7ed3\u679c：<\/p>\n 99.3%\u3002<\/p>\n \u65b9\u6848 D：\u589e\u52a0\u7b2c\u4e8c\u68c0\u6d4b\u901a\u9053<\/h4>\n\u6210\u672c：<\/p>\n \u9ad8\u3002<\/p>\n \u7ed3\u679c：<\/p>\n 99.8%\u3002<\/p>\n \u5982\u679c\u6ca1\u6709\u7cfb\u7edf\u7ea7\u4eff\u771f，<\/p>\n \u7814\u53d1\u56e2\u961f\u5f88\u53ef\u80fd\u5148\u4e70：<\/p>\n \u66f4\u8d35\u7684\u7269\u955c；<\/p>\n \u66f4\u8d35\u7684\u76f8\u673a\u3002<\/p>\n \u56e0\u4e3a\u5b83\u4eec\u6700\u7b26\u5408\u4f20\u7edf\u76f4\u89c9\u3002<\/p>\n \u4f46\u4eff\u771f\u53ef\u80fd\u544a\u8bc9\u4f60：<\/p>\n \u771f\u6b63\u6700\u5927\u7684\u589e\u76ca\u6765\u81ea\u7167\u660e\u548c\u4f20\u64ad\u6761\u4ef6\u3002<\/p>\n \u8fd9\u5c31\u662f\u4eff\u771f\u4ece：<\/p>\n Optical Analysis<\/p>\n \u8fdb\u5165：<\/p>\n Engineering Decision\u3002<\/p>\n
\n\u5341\u4e94\u3001\u751a\u81f3\u7b97\u6cd5\u56e2\u961f\u4e5f\u5e94\u8be5\u53c2\u4e0e\u8fd9\u4e2a\u95ed\u73af<\/h2>\n\u4f20\u7edf\u5de5\u4f5c\u65b9\u5f0f\u901a\u5e38\u662f：<\/p>\n \u5149\u5b66\u56e2\u961f\u4ea4\u56fe\u50cf\u3002<\/p>\n \u2193<\/p>\n \u7b97\u6cd5\u56e2\u961f\u60f3\u529e\u6cd5\u8bc6\u522b\u3002<\/p>\n \u4f46\u5982\u679c optical signal \u672c\u8eab：<\/p>\n [
\nSNR<1
\n]<\/p>\n \u518d\u590d\u6742\u7684 AI \u90fd\u662f\u5728\u5c1d\u8bd5\u4ece\u51e0\u4e4e\u6ca1\u6709\u4fe1\u606f\u7684\u8f93\u5165\u4e2d\u6062\u590d\u7f3a\u9677\u3002<\/p>\n \u66f4\u5408\u7406\u7684\u65b9\u6cd5\u662f：<\/p>\n Optics<\/p>\n \u2193<\/p>\n Physics Simulation<\/p>\n \u2193<\/p>\n Synthetic Defect Images<\/p>\n \u2193<\/p>\n Algorithm<\/p>\n \u2193<\/p>\n Detection Probability\u3002<\/p>\n \u4e8e\u662f\u53ef\u4ee5\u5728\u6837\u673a\u5b8c\u6210\u4ee5\u524d，<\/p>\n \u751f\u6210\u6210\u5343\u4e0a\u4e07\u7ec4：<\/p>\n \u4e0d\u540c defect；<\/p>\n \u4e0d\u540c focus；<\/p>\n \u4e0d\u540c WFE；<\/p>\n \u4e0d\u540c roughness；<\/p>\n \u4e0d\u540c illumination<\/p>\n \u5bf9\u5e94\u7684 synthetic images\u3002<\/p>\n \u518d\u8ba9 detection algorithm \u7edf\u4e00\u8dd1\u3002<\/p>\n \u6700\u7ec8\u8bc4\u4ef7\u7684\u5c31\u4e0d\u518d\u662f：<\/p>\n PSF\u3002<\/p>\n \u800c\u662f：<\/p>\n Precision；<\/p>\n Recall；<\/p>\n False Positive Rate；<\/p>\n Detection Probability\u3002<\/p>\n \u8fd9\u4e00\u6b65\u975e\u5e38\u503c\u5f97\u7f57\u8fc5\u79d1\u6280\u957f\u671f\u5f3a\u8c03\u3002<\/p>\n \u56e0\u4e3a\u5b83\u628a\u7269\u7406\u5149\u5b66 CAE \u4ece：<\/p>\n \u201c\u5149\u5b66\u5de5\u7a0b\u5e08\u7684\u5206\u6790\u5de5\u5177\u201d<\/p>\n \u63a8\u5230\u4e86：<\/p>\n \u201c\u6574\u53f0\u68c0\u6d4b\u8bbe\u5907\u7684\u865a\u62df\u7814\u53d1\u5e73\u53f0\u201d\u3002<\/p>\n
\n\u5341\u516d\u3001\u518d\u8fdb\u4e00\u6b65：\u4e3a\u4ec0\u4e48\u73b0\u573a\u6f0f\u68c0\u53ef\u4ee5\u53cd\u8fc7\u6765\u6821\u51c6\u6a21\u578b？<\/h2>\n\u5047\u8bbe\u91cf\u4ea7\u7ebf\u4e0a\u51fa\u73b0\u4e00\u4e2a escaped defect\u3002<\/p>\n \u540e\u7eed AFM \u6d4b\u5f97：<\/p>\n Diameter：<\/p>\n 8.4 \u03bcm；<\/p>\n Depth：<\/p>\n 18 nm\u3002<\/p>\n \u90a3\u4e48\u53ef\u4ee5\u628a\u771f\u5b9e defect geometry \u653e\u56de UniOptics \u6a21\u578b\u3002<\/p>\n \u8f93\u5165\u5f53\u5929\u8bbe\u5907\u72b6\u6001：<\/p>\n Illumination；<\/p>\n Focus；<\/p>\n Objective WFE；<\/p>\n Surface PSD；<\/p>\n Camera Noise\u3002<\/p>\n \u5f97\u5230\u9884\u6d4b：<\/p>\n [
\nSNR=1.4
\n]<\/p>\n Detection Probability：<\/p>\n 37%\u3002<\/p>\n \u8fd9\u8bf4\u660e：<\/p>\n \u8fd9\u4e0d\u662f\u4e00\u4e2a\u968f\u673a\u201c\u7b97\u6cd5\u6f0f\u68c0\u201d\u3002<\/p>\n \u800c\u662f\u5f53\u524d optical operating point \u672c\u6765\u5c31\u5904\u4e8e\u5371\u9669\u533a\u57df\u3002<\/p>\n \u63a5\u4e0b\u6765\u53ef\u4ee5\u505a Virtual Action：<\/p>\n Focus：<\/p>\n +80 \u03bcm；<\/p>\n Coherence：<\/p>\n \u964d\u4f4e 30%；<\/p>\n Aperture：<\/p>\n \u8c03\u6574\u3002<\/p>\n \u9884\u6d4b：<\/p>\n [
\nSNR:1.4\\\\rightarrow5.8
\n]<\/p>\n Detection Probability：<\/p>\n [
\n37%\\\\rightarrow99.1%
\n]<\/p>\n \u8fd9\u65f6\u73b0\u573a\u95ee\u9898\u7b2c\u4e00\u6b21\u771f\u6b63\u5f62\u6210：<\/p>\n Measurement \u2192 Model \u2192 Root Cause \u2192 Action\u3002<\/p>\n
\n\u5341\u4e03\u3001\u8fd9\u624d\u662f AOI \u7684\u6570\u5b57\u5b6a\u751f\u771f\u6b63\u5e94\u8be5\u957f\u4ec0\u4e48\u6837<\/h2>\n\u8f93\u5165\u771f\u5b9e\u8bbe\u5907\u53c2\u6570：<\/p>\n Source；<\/p>\n Spectrum；<\/p>\n Coherence；<\/p>\n Polarization；<\/p>\n Objective；<\/p>\n NA；<\/p>\n WFE；<\/p>\n Focus；<\/p>\n Detector；<\/p>\n Pixel\u3002<\/p>\n \u8f93\u5165\u771f\u5b9e\u4ea7\u54c1：<\/p>\n Material；<\/p>\n Surface PSD；<\/p>\n Layer Stack；<\/p>\n Defect Library\u3002<\/p>\n \u7269\u7406\u5c42：<\/p>\n Maxwell \/ Complex Field；<\/p>\n Diffraction；<\/p>\n Propagation；<\/p>\n Partial Coherence；<\/p>\n Imaging\u3002<\/p>\n \u8f93\u51fa：<\/p>\n Synthetic Detector Image\u3002<\/p>\n \u518d\u8fdb\u5165：<\/p>\n Detection Algorithm\u3002<\/p>\n \u6700\u7ec8\u8f93\u51fa：<\/p>\n [
\nP_{\\\\rm detect}
\n]<\/p>\n [
\nFalse\\\\ Positive
\n]<\/p>\n [
\nSNR
\n]<\/p>\n [
\nOperating\\\\ Window
\n]<\/p>\n \u7136\u540e\u4e0e：<\/p>\n AFM；<\/p>\n SEM；<\/p>\n Interferometer；<\/p>\n Real AOI Image<\/p>\n \u8fdb\u884c\u6821\u51c6\u3002<\/p>\n \u8fd9\u624d\u662f\u4e00\u5957\u771f\u6b63\u6709\u5de5\u7a0b\u610f\u4e49\u7684：<\/p>\n Inspection Digital Twin\u3002<\/p>\n
\n![\"\"](\"https:\/\/www.wsisp.com\/helps\/wp-content\/uploads\/2026\/09\/20260901171734-6a9708ae4632c.png\") <\/h3>\n
\n\u5341\u516b\u3001\u73b0\u5728\u56de\u5230\u5f00\u5934\u90a3\u4e2a 20 nm \u7f3a\u9677<\/h2>\n
\u4e3a\u4ec0\u4e48：<\/p>\n AFM \u770b\u5f97\u89c1；<\/p>\n \u767d\u5149\u5e72\u6d89\u4eea\u770b\u5f97\u89c1；<\/p>\n AOI \u5374\u770b\u4e0d\u89c1？<\/p>\n \u7b54\u6848\u5e76\u4e0d\u662f\u7b80\u5355\u7684：<\/p>\n \u201cAOI \u5206\u8fa8\u7387\u4e0d\u591f\u3002\u201d<\/p>\n \u771f\u6b63\u7684\u7269\u7406\u94fe\u662f：<\/p>\n [
\nDefect\\\\ Geometry
\n]<\/p>\n \u2193<\/p>\n [
\nAmplitude+Phase
\n]<\/p>\n \u2193<\/p>\n [
\nComplex\\\\ Field
\n]<\/p>\n \u2193<\/p>\n [
\nPropagation
\n]<\/p>\n \u2193<\/p>\n [
\nObjective\\\\ Pupil
\n]<\/p>\n \u2193<\/p>\n [
\nIntensity\\\\ Contrast
\n]<\/p>\n \u2193<\/p>\n [
\nNoise
\n]<\/p>\n \u2193<\/p>\n [
\nDetection\\\\ Probability
\n]<\/p>\n \u5176\u4e2d\u4efb\u4f55\u4e00\u4e2a\u73af\u8282\u53d1\u751f\u53d8\u5316，<\/p>\n \u540c\u4e00\u4e2a 20 nm \u7f3a\u9677，<\/p>\n \u5728\u76f8\u673a\u4e0a\u90fd\u53ef\u80fd\u53d8\u6210\u5b8c\u5168\u4e0d\u540c\u7684\u4e1c\u897f\u3002<\/p>\n \u6240\u4ee5\u771f\u6b63\u7684\u95ee\u9898\u4ece\u6765\u4e0d\u662f：<\/p>\n \u201c\u8fd9\u4e2a\u7f3a\u9677\u6709\u591a\u5927？\u201d<\/p>\n \u800c\u5e94\u8be5\u662f：<\/p>\n \u201c\u8fd9\u4e2a\u7f3a\u9677\u7ecf\u8fc7\u6574\u5957\u5149\u5b66\u7cfb\u7edf\u4ee5\u540e，\u8fd8\u5269\u4e0b\u591a\u5c11\u53ef\u68c0\u6d4b\u4fe1\u606f？\u201d<\/p>\n
\n\u5341\u4e5d\u3001\u4e3a\u4ec0\u4e48\u8fd9\u7c7b\u95ee\u9898\u8d8a\u6765\u8d8a\u9700\u8981\u7cfb\u7edf\u7ea7\u7269\u7406\u5149\u5b66？<\/h2>\n\u5982\u679c\u53ea\u7528\u4e00\u53e5\u8bdd\u89e3\u91ca\u7269\u7406\u5149\u5b66\u4eff\u771f：<\/p>\n \u201c\u53ef\u4ee5\u8ba1\u7b97\u884d\u5c04\u3002\u201d<\/p>\n \u5176\u5b9e\u8fdc\u8fdc\u4e0d\u591f\u3002<\/p>\n \u5982\u679c\u518d\u8fdb\u4e00\u6b65\u8bf4：<\/p>\n \u201c\u53ef\u4ee5\u8ba1\u7b97 PSF\u3002\u201d<\/p>\n \u4ecd\u7136\u53ea\u662f\u63cf\u8ff0\u4e86\u4e00\u7c7b\u5206\u6790\u80fd\u529b\u3002<\/p>\n \u5728\u771f\u5b9e\u5de5\u7a0b\u4e2d，\u66f4\u91cd\u8981\u7684\u95ee\u9898\u662f：<\/p>\n \u5f53\u4ea7\u54c1\u6027\u80fd\u7531\u632f\u5e45\u3001\u76f8\u4f4d\u3001\u504f\u632f\u3001\u76f8\u5e72\u6027\u3001\u7a7a\u95f4\u9891\u7387\u548c\u4f20\u64ad\u5171\u540c\u51b3\u5b9a\u65f6，\u80fd\u4e0d\u80fd\u628a\u8fd9\u4e9b\u7269\u7406\u91cf\u4e00\u76f4\u4f20\u9012\u5230\u6700\u7ec8\u5de5\u7a0b KPI？<\/p>\n \u5bf9\u4e8e\u7cbe\u5bc6\u68c0\u6d4b：<\/p>\n [
\nDefect
\n\\\\rightarrow
\nComplex\\\\ Field
\n\\\\rightarrow
\nDetector
\n\\\\rightarrow
\nDetection
\n]<\/p>\n \u5bf9\u4e8e\u6fc0\u5149\u52a0\u5de5：<\/p>\n [
\nSource
\n\\\\rightarrow
\nOptical\\\\ System
\n\\\\rightarrow
\nMaterial\\\\ Plane
\n\\\\rightarrow
\nProcess\\\\ KPI
\n]<\/p>\n \u5bf9\u4e8e\u81ea\u7531\u7a7a\u95f4\u5149\u901a\u4fe1：<\/p>\n [
\nAtmosphere
\n\\\\rightarrow
\nReceiver
\n\\\\rightarrow
\nFiber\\\\ Mode
\n\\\\rightarrow
\nLink\\\\ KPI
\n]<\/p>\n \u8fd9\u4e9b\u770b\u8d77\u6765\u5b8c\u5168\u4e0d\u540c\u7684\u884c\u4e1a\u95ee\u9898，\u80cc\u540e\u5176\u5b9e\u5171\u4eab\u7740\u4e00\u79cd\u5de5\u7a0b\u8bed\u8a00：<\/p>\n \u7cfb\u7edf\u7ea7\u7269\u7406\u5149\u5b66\u3002<\/p>\n
\n\u4e8c\u5341\u3001\u6700\u7ec8\u8981\u4f18\u5316\u7684，\u4e0d\u662f\u4e00\u5f20\u66f4\u6f02\u4eae\u7684\u56fe\u50cf<\/h2>\n\u5047\u8bbe\u4e0b\u4e00\u4ee3 AOI \u7cfb\u7edf\u6b63\u5728\u8bbe\u8ba1\u3002<\/p>\n \u771f\u6b63\u503c\u5f97\u56de\u7b54\u7684\u95ee\u9898\u5e94\u8be5\u662f：<\/p>\n \u4e00\u4e2a 10 \u03bcm \u00d7 20 nm \u7684 phase pit \u4e3a\u4ec0\u4e48\u4f1a\u6f0f\u68c0？<\/p>\n NA \u4ece 0.20 \u63d0\u9ad8\u5230 0.40 \u5230\u5e95\u503c\u4e0d\u503c\u5f97？<\/p>\n \u5e94\u8be5\u5347\u7ea7\u7269\u955c，\u8fd8\u662f\u91cd\u65b0\u8bbe\u8ba1 illumination？<\/p>\n \u76f8\u673a pixel \u7ee7\u7eed\u51cf\u5c0f\u8fd8\u80fd\u5e26\u6765\u591a\u5c11\u5b9e\u9645\u6536\u76ca？<\/p>\n Defocus tolerance \u5e94\u8be5\u600e\u6837\u5206\u914d？<\/p>\n Surface PSD \u5230\u4ec0\u4e48\u7a0b\u5ea6\u5f00\u59cb\u663e\u8457\u589e\u52a0 false positive？<\/p>\n \u6ee1\u8db3：<\/p>\n [
\nP_{\\\\rm detect}>99%
\n]<\/p>\n \u7684 operating window \u5728\u54ea\u91cc？<\/p>\n \u5982\u679c\u4e0b\u4e00\u7248\u8bbe\u5907\u53ea\u80fd\u4fee\u6539\u4e00\u4e2a\u53c2\u6570，\u5e94\u8be5\u4f18\u5148\u6539\u54ea\u91cc？<\/p>\n \u5f53\u6a21\u578b\u80fd\u591f\u56de\u7b54\u8fd9\u4e9b\u95ee\u9898\u65f6，<\/p>\n \u7269\u7406\u5149\u5b66\u4eff\u771f\u7684\u610f\u4e49\u5c31\u53d1\u751f\u4e86\u53d8\u5316\u3002<\/p>\n \u5b83\u4e0d\u518d\u53ea\u662f：<\/p>\n \u201c\u628a\u5149\u4f20\u64ad\u4e00\u6b21\u3002\u201d<\/p>\n \u800c\u662f：<\/p>\n \u5728\u6602\u8d35\u7684\u6837\u673a\u5236\u9020\u548c\u73b0\u573a\u8bd5\u9519\u4e4b\u524d，\u63d0\u524d\u7406\u89e3\u771f\u5b9e\u5149\u5b66\u673a\u5236，\u5e76\u628a\u8fd9\u79cd\u7406\u89e3\u8f6c\u5316\u6210\u53ef\u4ee5\u6bd4\u8f83\u3001\u53ef\u4ee5\u9a8c\u8bc1\u7684\u5de5\u7a0b\u51b3\u7b56\u3002<\/p>\n \u8fd9\u53ef\u80fd\u624d\u662f\u73b0\u4ee3\u5149\u5b66\u4eff\u771f\u771f\u6b63\u503c\u5f97\u5173\u6ce8\u7684\u5730\u65b9\u3002<\/p>\n","protected":false},"excerpt":{"rendered":" \u4e00\u6761\u7cbe\u5bc6\u73bb\u7483\u57fa\u677f\u68c0\u6d4b\u7ebf\u9047\u5230\u4e86\u4e00\u4e2a\u5f88\u5947\u602a\u7684\u95ee\u9898\u3002\u4e0b\u6e38\u91cf\u6d4b\u8bbe\u5907\u786e\u8ba4：\u67d0\u6279\u4ea7\u54c1\u8868\u9762\u5b58\u5728\u5c40\u90e8\u5fae\u51f9\u5751\u3002\u5178\u578b\u5c3a\u5bf8：\u76f4\u5f84\u7ea6 8\u201315 \u03bcm；\u6df1\u5ea6\u7ea6 20\u201340 nm\u3002AFM \u53ef\u4ee5\u6d4b\u51fa\u6765\u3002\u767d\u5149\u5e72\u6d89\u4eea\u4e5f\u80fd\u770b\u5230\u3002\u4f46\u662f\u5728\u7ebf AOI \u76f8\u673a\u4e0a，\u540c\u4e00\u4e2a\u4f4d\u7f6e\u51e0\u4e4e\u6ca1\u6709\u660e\u663e\u7070\u5ea6\u5f02\u5e38\u3002\u7814\u53d1\u56e2\u961f\u9996\u5148\u6000\u7591：\u662f\u4e0d\u662f\u76f8\u673a\u5206\u8fa8\u7387\u4e0d\u591f？\u4e8e\u662f\u6362\u66f4\u9ad8\u50cf\u7d20\u76f8\u673a\u3002\u6548\u679c\u6709\u9650\u3002\u63a5\u7740\u6000\u7591：\u662f\u4e0d\u662f\u7167\u660e\u529f\u7387\u4e0d\u591f？\u628a LED \u529f\u7387\u63d0<\/p>\n","protected":false},"author":2,"featured_media":99173,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[1],"tags":[371,202,2874],"topic":[],"class_list":["post-99179","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-server","tag-371","tag-202","tag-2874"],"yoast_head":"\n \u7f3a\u9677\u660e\u660e\u6709 20 nm \u6df1\uff0c\u4e3a\u4ec0\u4e48 AOI \u76f8\u673a\u5374\u4ec0\u4e48\u90fd\u770b\u4e0d\u89c1\uff1f\u2014\u2014\u4ece\u201c\u6709\u6ca1\u6709\u7f3a\u9677\u201d\u5230\u201c\u7f3a\u9677\u80fd\u4e0d\u80fd\u53d8\u6210\u7070\u5ea6\u5dee\u201d\uff1a\u7cbe\u5bc6\u5149\u5b66\u68c0\u6d4b\u91cc\u6700\u5bb9\u6613\u88ab\u5ffd\u7565\u7684\u4e00\u6bb5\u7269\u7406\u4f20\u64ad - 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