{"id":52406,"date":"2025-08-11T14:09:12","date_gmt":"2025-08-11T06:09:12","guid":{"rendered":"https:\/\/www.wsisp.com\/helps\/52406.html"},"modified":"2025-08-11T14:09:12","modified_gmt":"2025-08-11T06:09:12","slug":"%e5%85%89%e5%ad%a6%e8%bd%ae%e5%bb%93%e4%bb%aa%e5%ba%94%e7%94%a8%ef%bc%9a%e9%93%9d%e5%90%88%e9%87%91%e5%8f%8d%e5%b0%84%e9%95%9c-nip-%e9%95%80%e5%b1%82%e7%9a%84%e7%a3%81%e6%b5%81%e5%8f%98%e6%8a%9b","status":"publish","type":"post","link":"https:\/\/www.wsisp.com\/helps\/52406.html","title":{"rendered":"\u5149\u5b66\u8f6e\u5ed3\u4eea\u5e94\u7528\uff1a\u94dd\u5408\u91d1\u53cd\u5c04\u955c NiP \u9540\u5c42\u7684\u78c1\u6d41\u53d8\u629b\u5149\u6280\u672f\u7814\u7a76"},"content":{"rendered":"

\u94dd\u5408\u91d1\u53cd\u5c04\u955c\u662f\u5927\u578b\u592a\u7a7a\u671b\u8fdc\u955c\u7b49\u5149\u5b66\u7cfb\u7edf\u6838\u5fc3\u90e8\u4ef6，\u8868\u9762\u8d28\u91cf\u5f71\u54cd\u6210\u50cf\u7cbe\u5ea6\u3002NiP \u9540\u5c42\u7ecf\u5355\u70b9\u91d1\u521a\u77f3\u8f66\u524a\u540e\u6b8b\u7559\u87ba\u65cb\u72b6\u5200\u75d5，\u5bfc\u81f4\u8272\u6563\u548c\u91cd\u5f71，\u9700\u8fdb\u4e00\u6b65\u629b\u5149\u3002\u78c1\u6d41\u53d8\u629b\u5149\u56e0\u9ad8\u6548\u3001\u4f18\u8d28\u3001\u4f4e\u6210\u672c\u6210\u4e3a\u6f5c\u5728\u65b9\u6848\u3002\u5149\u5b50\u6e7e\u79d1\u6280\u7684\u5149\u5b66\u8f6e\u5ed3\u4eea\u7b49\u6280\u672f\u5728\u7cbe\u5bc6\u68c0\u6d4b\u4e2d\u4f5c\u7528\u663e\u8457\u3002\u672c\u6587\u7ed3\u5408\u4e09\u7ef4\u8f6e\u5ed3\u6280\u672f，\u7814\u7a76\u94dd\u5408\u91d1\u53cd\u5c04\u955c NiP \u9540\u5c42\u7684\u78c1\u6d41\u53d8\u8d85\u7cbe\u5bc6\u629b\u5149，\u4e3a\u9ad8\u7cbe\u5ea6\u5149\u5b66\u5143\u4ef6\u5236\u9020\u63d0\u4f9b\u652f\u6491\u3002<\/p>\n

\n

\u4e00\u3001\u7814\u7a76\u80cc\u666f<\/p>\n

\"\"<\/p>\n

\u78c1\u6d41\u53d8\u629b\u5149\u539f\u7406\u56fe<\/p>\n

\u8d85\u7cbe\u5bc6\u629b\u5149\u6280\u672f\u73b0\u72b6：\u4e3b\u6d41\u6280\u672f\u6709\u5316\u5b66\u673a\u68b0\u629b\u5149（CMP）\u3001\u5e94\u529b\u76d8\u629b\u5149（SLP）\u3001\u79bb\u5b50\u675f\u629b\u5149（IBF）\u3001\u6c14\u56ca\u629b\u5149（ABP）\u7b49，\u4f46\u5404\u6709\u5c40\u9650：CMP \u6750\u6599\u9002\u5e94\u6027\u5dee\u4e14\u6c61\u67d3\u73af\u5883；SLP \u5bf9\u8f6f\u8d28\u6750\u6599\u9002\u7528\u6027\u6709\u9650；IBF \u6548\u7387\u4f4e\u4e14\u8bbe\u5907\u6602\u8d35；ABP\u538b\u529b\u63a7\u5236\u96be\u5ea6\u5927\u3002<\/p>\n

\u78c1\u6d41\u53d8\u629b\u5149\u4e0e NiP \u9540\u5c42\u629b\u5149\u7814\u7a76\u73b0\u72b6：\u78c1\u6d41\u53d8\u629b\u5149\u6280\u672f\u73b0\u6709\u8f6e\u5f0f\u3001\u7403\u5934\u5f0f\u3001\u96c6\u7fa4\u5f0f\u7b49\u5f62\u5f0f，\u96c6\u7fa4\u5f0f\u66f4\u9002\u7528\u4e8e\u5e73\u9762\u5de5\u4ef6\u9ad8\u6548\u629b\u5149\u3002NiP \u9540\u5c42\u629b\u5149\u4e2d，\u4f20\u7edf\u6280\u672f\u96be\u517c\u987e\u6548\u7387\u4e0e\u7cbe\u5ea6，\u78c1\u6d41\u53d8\u629b\u5149\u867d\u5df2\u5e94\u7528，\u4f46\u9700\u4f18\u5316\u5de5\u827a\u4ee5\u53bb\u9664\u5468\u671f\u6027\u5200\u75d5\u3002<\/p>\n

\n

\u4e8c\u3001NiP \u9540\u5c42\u7684\u57fa\u672c\u6027\u8d28\u4e0e\u8868\u5f81\u65b9\u6cd5<\/p>\n

\"\"<\/p>\n

\u7ecfSPDT\u540e\u8868\u9762\u8272\u6563\u73b0\u8c61 (a)\u8f66\u524a\u8868\u9762\u5149\u955c\u56fe(b)\u53cd\u5c04\u955c\u8868\u9762\u201c\u5f69\u8679\u6591\u56fe<\/p>\n

1. NiP \u9540\u5c42\u57fa\u672c\u7279\u6027<\/p>\n

\u5b9e\u9a8c\u6240\u7528 NiP \u9540\u5c42\u4e3a\u975e\u6676\u7ed3\u6784，P \u542b\u91cf 6.2wt.%，\u539a\u5ea6 32.4\u03bcm，\u663e\u5fae\u786c\u5ea6 HV1.0 \u7ea6 460，\u7ed3\u6784\u81f4\u5bc6\u5747\u5300，\u9002\u5408\u8d85\u7cbe\u5bc6\u629b\u5149\u3002<\/p>\n

2. SPDT \u52a0\u5de5\u7f3a\u9677<\/p>\n

SPDT \u52a0\u5de5\u540e\u6b8b\u7559\u7684\u87ba\u65cb\u72b6\u5200\u75d5\u7c7b\u4f3c\u53cd\u5c04\u5149\u6805，\u4f1a\u5bfc\u81f4 \u201c\u5f69\u8679\u6591\u201d \u73b0\u8c61，\u5f71\u54cd\u6210\u50cf\u8d28\u91cf，\u9700\u901a\u8fc7\u629b\u5149\u53bb\u9664\u3002<\/p>\n

3. \u5f62\u8c8c\u8868\u5f81\u4e0e\u5206\u6790\u65b9\u6cd5<\/p>\n

\u91c7\u7528\u5149\u5b66\u8f6e\u5ed3\u4eea\u548c\u539f\u5b50\u529b\u663e\u5fae\u955c\u8868\u5f81\u8868\u9762\u5f62\u8c8c，\u5149\u5b66\u8f6e\u5ed3\u4eea\u5782\u76f4\u5206\u8fa8\u7387\u8fbe 0.1nm，AFMZ \u8f74\u5206\u8fa8\u7387\u8fbe 0.03nm\u3002\u5f15\u5165\u529f\u7387\u8c31\u5bc6\u5ea6（PSD）\u5b9a\u91cf\u5206\u6790\u8868\u9762\u7c97\u7cd9\u5ea6\u4e0e\u7a7a\u95f4\u9891\u7387\u5206\u5e03，\u5f25\u8865\u4f20\u7edf\u8bc4\u4ef7\u65b9\u6cd5\u7684\u4e0d\u8db3\u3002<\/p>\n

\n

\u4e09\u3001\u78c1\u6d41\u53d8\u629b\u5149\u6db2\u7684\u5236\u5907\u4e0e\u8868\u5f81<\/p>\n

1. \u7ec4\u6210\u4e0e\u914d\u65b9<\/p>\n

\u9009\u7528\u53bb\u79bb\u5b50\u6c34\u4e3a\u57fa\u8f7d\u6db2，\u7fb0\u57fa\u94c1\u7c89\u4e3a\u78c1\u6027\u9897\u7c92，100nm \u6c27\u5316\u94c8\u4e3a\u78e8\u7c92，\u6dfb\u52a0\u516d\u504f\u78f7\u9178\u94a0（\u5206\u6563\u5242）\u3001\u6c14\u76f8\u4e8c\u6c27\u5316\u7845（\u89e6\u53d8\u5242）\u7b49，\u4f18\u5316\u914d\u65b9\u4ee5\u63d0\u5347\u7a33\u5b9a\u6027\u548c\u526a\u5207\u6027\u80fd\u3002<\/p>\n

2. \u6027\u80fd\u6307\u6807<\/p>\n

\u5236\u5907\u7684\u629b\u5149\u6db2\u526a\u5207\u5e94\u529b（500mT）\u8fbe 35.6kPa，42h \u6c89\u964d\u7387\u4ec5 17.5%，\u96f6\u573a\u7c98\u5ea6\u4f4e，\u6ee1\u8db3\u8d85\u7cbe\u5bc6\u629b\u5149\u8981\u6c42\u3002<\/p>\n

\n

\u56db\u3001\u78c1\u6d41\u53d8\u629b\u5149\u8bd5\u9a8c\u8bbe\u5907\u8bbe\u8ba1\u4e0e\u642d\u5efa<\/p>\n

1. \u8bbe\u5907\u7ec4\u6210<\/p>\n

\u8bbe\u5907\u5305\u62ec\u629b\u5149\u76d8\u3001\u5de5\u4ef6\u8f74\u3001\u52b1\u78c1\u88c5\u7f6e\u7b49，\u629b\u5149\u76d8\u8f6c\u901f 0~100rpm，\u5de5\u4ef6\u8f74\u8f6c\u901f 0~800rpm，\u53ef\u52a0\u5de5\u5c3a\u5bf8 < 100mm\u3002<\/p>\n

2.\u52b1\u78c1\u88c5\u7f6e\u4f18\u5316<\/p>\n

\u8bbe\u8ba1\u4e09\u79cd\u52b1\u78c1\u88c5\u7f6e，\u901a\u8fc7\u78c1\u573a\u4eff\u771f\u548c\u53bb\u9664\u7387\u5bf9\u6bd4，\u786e\u5b9a\u6d77\u5c14\u8d1d\u514b\u9635\u5217\u78c1\u94c1（HB35）\u6027\u80fd\u6700\u4f18，\u5176 4mm \u9ad8\u5ea6\u5904\u6700\u5927\u78c1\u901a\u5bc6\u5ea6\u8fbe 475mT，\u6750\u6599\u53bb\u9664\u7387\u8fbe 55.86nm\/min，\u4e3a\u5706\u67f1\u5f62\u78c1\u94c1\u7684 2.68 \u500d\u3002<\/p>\n

\n

\u4e94\u3001\u629b\u5149\u5de5\u827a\u4f18\u5316\u4e0e\u8868\u9762\u8d28\u91cf\u8bc4\u4ef7<\/p>\n

\"\"<\/p>\n

\u5149\u5b66\u8f6e\u5ed3\u4eea\u8868\u5f81\u8bd5\u9a8c\u629b\u5149\u540e\u7684\u4e09\u7ef4\u5f62\u8c8c\u56fe<\/p>\n

\u6b63\u4ea4\u8bd5\u9a8c：\u4ee5\u78e8\u7c92\u4f53\u79ef\u5206\u6570\u7b49\u4e3a\u56e0\u7d20，\u53d1\u73b0\u52a0\u5de5\u95f4\u9699\u5bf9\u53bb\u9664\u7387\u5f71\u54cd\u6700\u663e\u8457，\u629b\u5149\u76d8\u8f6c\u901f\u5bf9\u8868\u9762\u7c97\u7cd9\u5ea6\u5f71\u54cd\u6700\u663e\u8457，\u6700\u4f18\u5de5\u827a\u5b9e\u73b0\u8868\u9762\u7c97\u7cd9\u5ea6Sa=0.544nm\u3002<\/p>\n

\u8868\u9762\u8d28\u91cf\u6539\u5584：\u629b\u5149\u540e，\u5149\u5b66\u8f6e\u5ed3\u4eea\u6d4b\u5f97\u8868\u9762\u7c97\u7cd9\u5ea6\u00a0Sq \u4ece 3.776nm \u964d\u81f3 0.433nm（\u964d 88.5%），AFM \u6d4b\u5f97 Sq \u4ece 5.338nm \u964d\u81f3 0.961nm（\u964d 82%），\u87ba\u65cb\u72b6\u5200\u75d5\u5b8c\u5168\u53bb\u9664\u3002<\/p>\n

PSD \u5206\u6790：\u629b\u5149\u540e0.0012~12.7\u03bcm\u207b\u00b9 \u9891\u6bb5\u5185\u8868\u9762\u5168\u8bef\u5dee\u663e\u8457\u6539\u5584，\u5c24\u5176\u7a7a\u95f4\u9891\u7387 < 1\u03bcm\u207b\u00b9 \u8bef\u5dee\u53bb\u9664\u6548\u679c\u7a81\u51fa\u3002<\/p>\n

\n

\u7efc\u4e0a，\u5236\u5907\u9ad8\u6027\u80fd\u78c1\u6d41\u53d8\u629b\u5149\u6db2\u3001\u642d\u5efa\u8bd5\u9a8c\u8bbe\u5907\u53ca\u4f18\u5316\u5de5\u827a\u540e\u5b9e\u73b0 NiP \u9540\u5c42\u8d85\u5149\u6ed1\u8868\u9762（Sq<1nm），\u6709\u6548\u53bb\u9664\u5468\u671f\u6027\u5200\u75d5，\u63d0\u5347\u53cd\u5c04\u7387\u3002\u5149\u5b50\u6e7e\u79d1\u6280\u7684\u5149\u5b66\u8f6e\u5ed3\u4eea\u53ef\u4e3a\u672c\u7814\u7a76\u8868\u9762\u8d28\u91cf\u8bc4\u4ef7\u63d0\u4f9b\u5173\u952e\u652f\u6491，\u5176\u4e09\u7ef4\u6210\u50cf\u6280\u672f\u5728\u5149\u5b66\u5236\u9020\u9886\u57df\u7684\u6df1\u5ea6\u5e94\u7528，\u5c06\u6301\u7eed\u63a8\u52a8\u8d85\u7cbe\u5bc6\u52a0\u5de5\u6280\u672f\u7684\u53d1\u5c55\u4e0e\u521b\u65b0\u3002<\/p>\n

\n

\u5149\u5b50\u6e7e\u5149\u5b66\u8f6e\u5ed3\u4eea<\/p>\n

\u5149\u5b50\u6e7e\u5149\u5b66\u8f6e\u5ed3\u4eea\u662f\u4e00\u6b3e\u7528\u4e8e\u5bf9\u5404\u79cd\u7cbe\u5bc6\u5668\u4ef6\u53ca\u6750\u6599\u8868\u9762，\u53ef\u5e94\u5bf9\u591a\u6837\u5316\u6d4b\u91cf\u573a\u666f，\u80fd\u591f\u5feb\u901f\u9ad8\u6548\u5b8c\u6210\u4e9a\u5fae\u7c73\u7ea7\u5f62\u8c8c\u548c\u8868\u9762\u7c97\u7cd9\u5ea6\u7684\u7cbe\u51c6\u6d4b\u91cf\u4efb\u52a1，\u63d0\u4f9b\u503c\u5f97\u4fe1\u8d56\u7684\u9ad8\u8d28\u91cf\u6570\u636e\u3002<\/p>\n

\"\"<\/p>\n

\u8d85\u5bbd\u89c6\u91ce\u8303\u56f4，\u9ad8\u7cbe\u7ec6\u5f69\u8272\u56fe\u50cf\u89c2\u5bdf<\/p>\n

\u63d0\u4f9b\u7c97\u7cd9\u5ea6\u3001\u51e0\u4f55\u8f6e\u5ed3\u3001\u7ed3\u6784\u3001\u9891\u7387\u3001\u529f\u80fd\u7b49\u4e94\u5927\u5206\u6790\u6280\u672f<\/p>\n

\u91c7\u7528\u9488\u5b54\u5171\u805a\u7126\u5149\u5b66\u7cfb\u7edf，\u9ad8\u7a33\u5b9a\u6027\u7ed3\u6784\u8bbe\u8ba1<\/p>\n

\u63d0\u4f9b\u8c03\u6574\u4f4d\u7f6e\u3001\u7ea0\u6b63\u3001\u6ee4\u6ce2\u3001\u63d0\u53d6\u56db\u5927\u6a21\u5757\u7684\u6570\u636e\u5904\u7406\u529f\u80fd<\/p>\n

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